Waferpedia

Wafer size

3"

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9 entries

  1. EE-4Denton Vacuum

    The Denton Vacuum EE-4 is an electron beam deposition tool with a 6-position hearth, a dual chamber design, automated pump-down/venting, and capacity for multiple wafer sizes.

    CategoryDepositionWafer3"
  2. 94TPR Hoffman

    The PR Hoffman 94T is an insert carrier for double-sided planetary lapping and polishing machines, supporting 3-inch (76 mm) wafers.

    Categoryinsert carrierWafer3"
  3. 43TPR Hoffman

    The PR Hoffman 43T is a 43-tooth insert carrier for double-sided planetary lapping and polishing machines.

    CategoryInsert carrierWafer3"
  4. 72TPR Hoffman
    Categoryinsert carrier / lapping carrierWafer3"
  5. 870Semitool

    The Semitool 870 is a spin rinser/dryer that rinses substrates in DI water to 15 MΩ and dries them with heated nitrogen.

    CategorySpin Rinser/DryerWafer3"
  6. 60TPR Hoffman
    CategoryInsert carriers / lapping carriersWafer3"
  7. 98TPR Hoffman
    CategoryInsert carrier / lapping carrierWafer3"
  8. 270Semitool

    The Semitool 270 is a spin rinser/dryer for 3", 4", and 6" wafer boats.

    CategoryWet chemistryWafer3"
  9. MJB-3Karl Suss

    The Karl Suss MJB-3 is a contact/proximity mask aligner used with substrates up to 3 inches in diameter and capable of 365 nm or 405 nm illumination.

    CategoryLithographyWafer3"