Karl Suss

MJB-3

Lithography 3"Karl Suss MJB-3 family

Research Quality: 30% complete

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Karl SussMJB-3

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Plate 01Suss MJB3 350W Mask Aligner (ID 3885)
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Plate 02Karl Suss MJB-3 HP/ST Inv# 59511
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Plate 03Karl Suss MJB3 Mask Aligner #60007
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Plate 04Suss MJB3 350W BSA IR Mask Aligner (ID# 3845)
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Plate 05MNTL Karl Suss MJB3 Aligner training
cleanroom MNTLWatch on YouTube
Plate 06Karl Suss MJB3 UV Intensity Measurement and Verification Supplement
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Plate 07Karl Suss MJB3 Mask Aligner #59510
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Plate 08Karl Suss MJB3 Aligner #60414
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Wafer size

Optics

365 nm or 405 nm^[1]

What is it?

The MJB-3 Mask Aligner is described as a contact/proximity aligner used with a variety of positive and negative photoresists. The sources state that it works with substrates up to 3 inches in diameter, can be set to use either 365 nm or 405 nm light, and is located in a teaching lab environment.

What can it run?

Process applications and technology nodes documented for this tool.

Mask alignment
Photolithography

What do the numbers mean?

Optics & imaging1

Illumination wavelengths: 365 nm or 405 nm^[1]

Configuration & options5

OEM: Karl Suss^[1]
Model: MJB-3^[1]
Type: Contact/proximity aligner^[1]
Resists: Used with a variety of both positive and negative photoresists^[1]
Location: FabLab | Teaching Lab^[1]

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the MJB-3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MJB-3 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MJB-3 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MJB-3 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MJB-3 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MJB-3 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]nanocenter.umd.edu — nanocenter.umd.edunanocenter.umd.edu
[2]PHOTO-03: MJB-3 Mask aligner- right of spin station #1 | Equipment | Maryland NanoCenter FabLab — nanocenter.umd.edunanocenter.umd.edu
[3]ECE Teaching Cleanroom | Electrical and Computer Engineering | UC Santa Barbara — ece.ucsb.eduece.ucsb.edu