Comparison ledger
Applied Materials E 500 EHPI Medium Current and Axcelis NV 8250 HT Ion, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | E 500 EHPI Medium CurrentApplied Materials | NV 8250 HT IonAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials E 500 | Axcelis NV 8250 |
| Specifications | ||
| Loading Configuration | Open Cassette[2] | — |
| Software | V 13.30 rev D[2] | — |
| Floppy Drive Type | 3.5"[2] | — |
| Configuration | CE Mark[2] | 50/60 Hz[1] |
| Energy Range | 10 KeV - 200 KeV[2] | — |
| Solid State Scanner | 30 KV[2] | — |
| Gas Box Type | HP[2] | — |
| Computer Type | Pentium[2] | — |
| Voltage | — | 208 VAC[1] |
| Phase | — | 3 Phase[1] |
| Power | — | 36 kVA[1] |
| Input Breaker | — | 100 A[1] |
| Largest Load | — | 88 A[1] |
| Max. Interrupt Capacity | — | 85 A[1] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →