Applied Materials

E 500 EHPI Medium Current

Ion Implantation Applied Materials E 500 family

Research Quality: 30% complete

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E 500 EHPI Medium Current — Inventory photo — Fig. 01E 500 EHPI Medium CurrentInventory photo^[1]

Vacuum

Fast Cryo Regen^[1]

Gas delivery

HP^[1]

What is it?

The Applied Materials / Varian E 500 EHPI is a medium current implanter with a 6 inch wafer size.

What do the numbers mean?

Vacuum & pumping2

Fast Cryo Regen^[1]

Accurate?

OnBoard Cryos^[1]

Accurate?

Wafer handling1

Loading Configuration: Open Cassette^[1]

Gas & chemistry1

Gas Box Type: HP^[1]

Control & software4

Software: V 13.30 rev D^[1]; SECS II Interface^[1]
Computer Type: Pentium^[1]; Beam Purity Check Software^[1]

Configuration & options12

Floppy Drive Type: 3.5"^[1]; CE Mark^[1]; All cables present^[1]; GEM/SECS^[1]
Energy Range: 10 KeV - 200 KeV^[1]
Solid State Scanner: 30 KV^[1]; Roplat Tilter^[1]; Roplat Dual Motor^[1]; Cooled Platen^[1]; SDS^[1]; Signal Tower^[1]; Beam Energy Probe^[1]

Interested in this tool?

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Axcelis NV 8250— Same function class: Ion Implantation, UnknownCompare in depthsource^[2]
Axcelis NV 8250 HT Ion— Same function class: Ion Implantation, UnknownCompare in depthsource^[3]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationFast Cryo Regen^[1]
Gas Box TypeHP^[1]
ConfigurationOnBoard Cryos^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the E 500 EHPI Medium Current are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E 500 EHPI Medium Current are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the E 500 EHPI Medium Current are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the E 500 EHPI Medium Current are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the E 500 EHPI Medium Current are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the E 500 EHPI Medium Current is not on record.
Answerable by: an OEM datasheet or a fab qualification report