Waferpedia

Axcelis

NV 8250 HT Ion

Ion ImplantationAxcelis NV 8250 family
Research Quality: 30% complete
NV 8250 HT Ion — Inventory photo
Fig. 01NV 8250 HT IonInventory photo[1]

Power

208 VAC[1]

Vacuum

Cryopumps installed[1]

Gas delivery

Gas Box with SDS Bottles[1]

What is it?

Axcelis NV 8250 HT Ion Implanter is an 8-inch ion implanter with listed power and vacuum-related configuration details.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Two parts on the lower lock are worn out, resulting in slight play while moving.
  • Possible vacuum and particle issue (internal, not external).
  • Pneumatic block in the terminal has a broken input line.
  • No CDA pressure to move valve.

What do the numbers mean?

Power & electrical3

Voltage
208 VAC[1]
Accurate?
Phase
3 Phase[1]
Accurate?
50/60 Hz[1]
Accurate?

Vacuum & pumping3

Cryopumps installed[1]
Accurate?
Turbo Pumps installed[1]
Accurate?
Rough pumps installed[1]
Accurate?

Gas & chemistry1

Gas Box with SDS Bottles[1]
Accurate?

Configuration & options13

Power
36 kVA[1]
Accurate?
Input Breaker
100 A[1]
Accurate?
Largest Load
88 A[1]
Accurate?
Max. Interrupt Capacity
85 A[1]
Accurate?
Macobot for In-Air handling[1]
Accurate?
P3/P4/P5 On-Board 8 Edwards[1]
Accurate?
P1 STP 1003 C[1]
Accurate?
P2A STP 301C[1]
Accurate?
P2B STP 1003 C[1]
Accurate?
RP1 Edwards IGX 100 MTI[1]
Accurate?
RP2 Edwards QDP40[1]
Accurate?
RP3 Edwards iGX600M[1]
Accurate?
Issues:[1]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208 VAC[1]
  • Phase3 Phase[1]
  • Configuration50/60 Hz[1]
  • ConfigurationGas Box with SDS Bottles[1]
  • ConfigurationCryopumps installed[1]
  • ConfigurationTurbo Pumps installed[1]
  • ConfigurationRough pumps installed[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the NV 8250 HT Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV 8250 HT Ion are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NV 8250 HT Ion are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NV 8250 HT Ion are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the NV 8250 HT Ion is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the NV 8250 HT Ion are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Jul 29, 2026.

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