Comparison ledger
KLA 0035235-003 MMD Head, KLA P 16 +, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P 16 +KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | KLA P 16 + |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | 2A, 20in Hg @ 1cfm[2] |
| Model | 0035235-003[1] | — |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Phase | — | 1 Phase[2] |
| Software | — | (OS) version 7.31.05 [Build 5][2] |
| Tool type | — | Stylus profilometer[3] |
| Measurement type | — | Step height, roughness, waviness, stress[3] |
| Vertical range | — | 327 µm[3] |
| Wafer sizes | — | 2, 3, 4, 5, 6, 8, 12 inch[3] |
| Stage | — | Fully motorized X-Y, Z, theta, and level stage[3] |
| Stylus | — | 2 µm / 60D[3] |
| Operating system | — | Windows XP[3] |
| Applications | — | CMP monitoring and bump metrology[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →