Comparison ledger
KLA .204 PSL Wafer, KLA Puma 9130, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Puma 9130KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA Puma 9130 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | 50/60 Hz[5] |
| Wafer Size | 8 inch[3] | — |
| Traceability | NIST[4] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[2] | — |
| NIST Traceable | Yes[3] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[3] | — |
| Voltage | — | 208 V[5] |
| Phase | — | 3 Phase[5] |
| Full Load | — | 16 A[5] |
| Largest Load | — | 8 A[5] |
| Amps Full Load | — | 4[6] |
| OEM | — | KLA[7] |
| Model | — | Puma 9130[7] |
| Category | — | Metrology & Inspection[7] |
| Electrical | — | 208 V, 3 phase, 50/60 Hz[7] |
| Full load current | — | 16 A[5] |
| Largest load current | — | 8 A[5] |
| Vintage | — | 2007[5] |
| Power | — | 208 V, 3 phase, 50/60 Hz[7] |
| Manufacturer | — | KLA[7] |
| Tool type | — | Metrology and inspection tool[7] |
| Inspection type | — | Darkfield defect inspection system[7] |
| Primary application | — | Patterned wafer inspection[7] |
| Amps full load | — | 4 A[7] |
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