Comparison ledger
KLA RS 35 Sheet Resistance Measurement, Leica , Vistec INS 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Vistec INS 3000Leica | |
|---|---|---|
| OEM | KLA | Leica |
| Category | — | — |
| Wafer size | One wafer manual loader | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA RS 35 | Leica , Vistec INS 3000 |
| Cited variants |
| — |
| Specifications | ||
| Wafer size | One wafer manual loader[2] | Single 150/200 mm wafer loadport[3] |
| Configuration | Scan stage[2] | — |
| Process vac | 23 InHg[2] | — |
| CDA | 100 PSI[2] | — |
| Inlet Power | 1 line of 115 vac, 8 amp[2] | — |
| Wafer Size | 6 inch[2] | — |
| Wafer Handling | One wafer manual loader[2] | — |
| Scan Stage | Yes[2] | — |
| Process Vacuum | 23 InHg[2] | — |
| Type | — | Optical defect review station[3] |
| Wafer loadport | — | Single 150/200 mm wafer loadport[3] |
| Lighting | — | Bright field light source; DIC DUV light source[3] |
| Camera | — | UV and DUV camera[3] |
| Optics | — | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[3] |
| Software | — | Viscon Software[3] |
| Data interface | — | KLARF input[3] |