Waferpedia

KLA

RS 35 Sheet Resistance Measurement

One wafer manual loaderKLA RS 35 family
Research Quality: 30% complete
RS 35 Sheet Resistance Measurement — Inventory photo
Fig. 01RS 35 Sheet Resistance MeasurementInventory photo[1]

Wafer size

One wafer manual loader

Power

1 line of 115 vac, 8 amp[1]

Vacuum

100 PSI[1]

What is it?

The KLA RS 35 Sheet Resistance Measurement System is a 6-inch wafer system with a one wafer manual loader.

What do the numbers mean?

Power & electrical1

Inlet Power
1 line of 115 vac, 8 amp[1]
Accurate?

Vacuum & pumping1

CDA
100 PSI[1]
Accurate?

Wafer handling1

Wafer size
One wafer manual loader[1]
Accurate?

Configuration & options2

Scan stage[1]
Accurate?
Process vac
23 InHg[1]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • CDA100 PSI[1]
  • Inlet Power1 line of 115 vac, 8 amp[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the RS 35 Sheet Resistance Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RS 35 Sheet Resistance Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the RS 35 Sheet Resistance Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the RS 35 Sheet Resistance Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the RS 35 Sheet Resistance Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the RS 35 Sheet Resistance Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →