Waferpedia

Tool family

KLA RS 35

KLA2 entries
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Models in this family

  1. RS 35 C Sheet Resistance Measurement
  2. RS 35 Sheet Resistance Measurement

    The KLA RS 35 Sheet Resistance Measurement System is a 6-inch wafer system with a one wafer manual loader.

All entries

  1. RS 35 C Sheet Resistance MeasurementKLA
    1 spec
  2. RS 35 Sheet Resistance MeasurementKLA

    The KLA RS 35 Sheet Resistance Measurement System is a 6-inch wafer system with a one wafer manual loader.

    WaferOne wafer manual loader
    5 specs