Comparison ledger
Kurt Lesker ALD-150LX, Temescal SuperSweep64, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ALD-150LXKurt Lesker | SuperSweep64Temescal |
|---|---|---|
| OEM | Kurt Lesker | Temescal |
| Category | Deposition | Deposition |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2005 Third-party support only · 2026 End of life |
| Control system | — | — |
| Generation | — | — |
| Family | Kurt Lesker ALD-150LX | Temescal SuperSweep64 |
| Specifications | ||
| OEM | Kurt Lesker[1] | — |
| Model | ALD-150LX[1] | — |
| Load-locked | Yes[2] | — |
| In situ ellipsometer | Film Sense FS-1 Multi-Wavelength[2] | — |
| Available film growth by request | Al2O3, HfO2, ZrO2, HfZrO2, TiN, Ga2O3[2] | — |
| Maximum film thickness stated | up to 20 nm[2] | — |
| Substrate specification | No exposed organics such as polymers[2] | — |
| Small samples | Able to be clipped to wafer carrier[2] | — |
| Category | Deposition[3] | — |
| Wafer size | 150mm[3] | — |
| Process type | Plasma-enhanced atomic layer deposition (PE-ALD)[1] | — |
| Load-lock | Load-locked system[2] | — |
| In situ ellipsometry | Film Sense FS-1 Multi-Wavelength[2] | — |
| Supported films by request | Al2O3, HfO2, ZrO2, HfZrO2, TiN, Ga2O3[2] | — |
| controller type | — | programmable beam sweep controller[4] |
| system association | — | listed under the FC-4400 system's electron beam source, power supply, and sweep section[4] |
| wafer capacity referenced in associated system | — | 30 150 mm wafers per load[4] |
| Type | — | programmable beam sweep controller[4] |
| Operation | — | fully digital operation[5] |
| Internal waveform storage | — | up to 64 patterns[5] |
| Addressable points | — | 1024[5] |
| Waveform types | — | sine, triangle, saw-tooth, clipped, and arbitrary[5] |
| Frequency range | — | 1 to 200 Hz[5] |
| Max. sweep current | — | -4 A to +4 A[5] |
| Power requirements | — | 100–240 V ac, 50–60 Hz[5] |
| Computer I/O ports | — | RS-232 and RS-485[5] |
| Compatible system | — | Temescal FC-4400 deposition system[6] |
| Compatibility | — | Compatible with almost any commercially available e-beam gun[7] |
| Waveform resolution | — | 8 bits (0.4%)[7] |
| Weight | — | 10 lbs[7] |
| Product type | — | Digital e-beam sweeper / beam sweep controller[7] |
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