Waferpedia

Tool family

Temescal SuperSweep64

TemescalDeposition1 entry

Temescal SuperSweep64 is a programmable beam sweep controller named in the specifications for the FC-4400 deposition system.

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Models in this family

  1. SuperSweep64

    Temescal SuperSweep64 is a programmable beam sweep controller named in the specifications for the FC-4400 deposition system.