Temescal
SuperSweep64
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Temescal SuperSweep64 is a fully digital beam sweep controller. The Temescal SuperSweep64 stores up to 64 user-defined sweep patterns. The Temescal SuperSweep64 addresses 1024 discrete points.[1][2]
How it works
The Temescal SuperSweep64 can store up to 64 user-defined sweep patterns internally. The Temescal SuperSweep64 can design arbitrary sweep patterns that address, dwell at, or avoid any of 1024 discrete points. The Temescal SuperSweep64 uses Windows-based programming software for waveform design and modification, and the software allows waveform simulation on a PC plus control and monitoring of the unit by a PC. The Temescal SuperSweep64 also has a hand-held remote controller for designing waveforms while watching the beam sweep. The Temescal SuperSweep64 offers sine, triangle, saw-tooth, clipped, and arbitrary waveform types.[1][2]
The Temescal SuperSweep64 has a maximum sweep current range of -4 A to +4 A. The Temescal SuperSweep64 has a frequency range of 1 to 200 Hz. The Temescal SuperSweep64 has 8-bit waveform resolution at 0.4%. The Temescal SuperSweep64 provides RS-232 and RS-485 computer I/O ports. The Temescal SuperSweep64 supports remote sweep enable and remote modify enable inputs by contact closure or 24 VDC. The Temescal SuperSweep64 provides emission current control output of 0 to 10 VDC and coil current monitor output of 0 to 10 VDC per coil. The Temescal SuperSweep64 measures 8.5 inches wide by 5.25 inches high by 14 inches deep and weighs 10 pounds.[1][2]
What can it run?
Process applications and technology nodes documented for this tool.
- lift-off oriented evaporation
- metallization
What do the numbers mean?
Power & electrical3
- system association
- listed under the FC-4400 system's electron beam source, power supply, and sweep section[4]
Wafer handling1
Optics & imaging1
Control & software4
Dimensions & facilities1
Configuration & options9
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does the Temescal SuperSweep64 do?
The Temescal SuperSweep64 is a digital beam sweep controller for electron-beam guns. The Temescal SuperSweep64 provides fully digital operation and internal storage for up to 64 user-defined sweep patterns.[1][2]
How many sweep patterns can the Temescal SuperSweep64 store, and how fine is its pattern addressing?
The Temescal SuperSweep64 stores up to 64 patterns internally. The Temescal SuperSweep64 can design arbitrary sweep patterns that address, dwell at, or avoid any of 1024 discrete points.[1][2]
What waveform types does the Temescal SuperSweep64 support?
The Temescal SuperSweep64 supports sine, triangle, saw-tooth, clipped, and arbitrary waveforms.[1][2]
What are the main electrical and communications specifications of the Temescal SuperSweep64?
The Temescal SuperSweep64 has a maximum sweep current range of -4 A to +4 A and a frequency range of 1 to 200 Hz. The Temescal SuperSweep64 has 8-bit waveform resolution at 0.4%. The Temescal SuperSweep64 provides RS-232 and RS-485 computer I/O ports and accepts 100 to 240 VAC at 50 to 60 Hz.[1][2]
Not publicly documented
The following facts about the SuperSweep64 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the SuperSweep64 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SuperSweep64 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SuperSweep64 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SuperSweep64 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SuperSweep64 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]e-beam.ferrotec.com — e-beam.ferrotec.come-beam.ferrotec.com
- [2]e-beam.ferrotec.com — e-beam.ferrotec.come-beam.ferrotec.com
- [3]apintegration.com — apintegration.comapintegration.com
- [4]web.archive.org — web.archive.orgweb.archive.org
- [5]waferpedia.comwaferpedia.com
- [6]Temescal UEFC-5700 Deposition System — web.archive.orgweb.archive.org
- [7]Temescal FC/BCD-2800 Deposition System — web.archive.orgweb.archive.org
Last updated Oct 19, 2026.
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