Lam Research
Gasonics Vertical High Pressure (VHP) alternatives
Comparable Thermal / Diffusion equipment documented in the Waferpedia catalog.
6 comparable tools
Blue M
0 500
Thermal / Diffusion
Blue M
0 V 500
Thermal / Diffusion
Applied Materials
0242-36515 RTP XE Chamber Temperature Match Kit
Thermal / Diffusion
Varian
0332 F 9453 302 Diffusion
Thermal / Diffusion
CEE
1000 Hot Plate
Thermal / Diffusion
The CEE 1000 Hot Plate is a thermal processing tool for 4-inch wafers.
Heller
1088
Thermal / Diffusion
The Heller 1088 is a forced-convection SMT reflow oven designed for medium- to high-volume PCB assembly.
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