Plasma-Therm
Versaline Deep Silicon alternatives
Comparable Etch equipment documented in the Waferpedia catalog.
6 comparable tools
Oxford Instruments
100 ICP Fluorine
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Lam Research
2300 e 4 Exelan Flex ES Dielectric
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Lam Research
2300 e 4 Exelan Flex GX Dielectric
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Lam Research
2300 e 4 Exelan GX
Etch
The Lam 2300 e 4 Exelan GX is an etcher used in semiconductor manufacturing.
Lam Research
2300 e 4 Kiyo FX
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Lam Research
2300 e 4 Kiyo MCX Metal
Etch
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