Tegal
1511e alternatives
Comparable Etch equipment documented in the Waferpedia catalog.
6 comparable tools
Oxford Instruments
100 ICP Fluorine
Etch
Lam Research
2300
8"
Etch
Lam Research 2300 is an etch system used for pattern transfer in semiconductor processing. It belongs to the class of plasma-based etch equipment used to remove selected material from a wafer according to a patterned mask.
Lam Research
2300 e 4 Exelan Flex ES Dielectric
Etch
Lam Research
2300 e 4 Exelan Flex GX Dielectric
Etch
Lam Research
2300 e 4 Exelan GX
Etch
The Lam 2300 e 4 Exelan GX is an etcher used in semiconductor manufacturing.
Lam Research
2300 e 4 Kiyo FX
Etch
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