Tokyo Electron
Clean Track Lithius Pro V Resist alternatives
Comparable Wet Processing / Clean equipment documented in the Waferpedia catalog.
6 comparable tools
YES
1000FP
Wet Processing / Clean
The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.
YES
1000P
Wet Processing / Clean
The 1000P is a plasma cleaning system with four 16 x 16 inch shelves and a total capacity of 1024 square inches.
Hitachi
1305 BSG 3
Wet Processing / Clean
Hitachi
16036 N
Wet Processing / Clean
The Hitachi 16036 N is a clean bench system.
Electrovert
200 Cleaning
Wet Processing / Clean
SSEC
300 ML Evergreen Series III Wafer Mask
Wet Processing / Clean
SSEC 300 ML Evergreen Series III is a wafer mask scrubber.
Compare interactively
Need a side-by-side spec table? Open the compare tool to pick any two models.
Compare Clean Track Lithius Pro V Resist with another model →