Comparison ledger
ADE AFS-3220, KLA SFS 6420, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AFS-3220ADE | SFS 6420KLA |
|---|---|---|
| OEM | ADE | KLA |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ADE AFS-3220 | KLA SFS 6420 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Currently Configured for | 300mm[1] | — |
| Manufacturer | ADE[1] | KLA-Tencor[2] |
| Model | AFS-3220[1] | SFS 6420[2] |
| Equipment type | Wafer Characterization Metrology Equipment[1] | — |
| Configured wafer size | 300mm[1] | — |
| OEM manufacturing date | 2002[1] | — |
| Install date | 2002[1] | — |
| Date of last PM | 2017/4/13[1] | — |
| System status | Off-Line[1] | — |
| Handler type | BROOKS[1] | — |
| Robot type | BROOKS[1] | — |
| End-effector type | BROOKS[1] | — |
| Pre-aligner | Mini-Environment[1] | — |
| Control system | Windows NT[1] | — |
| Power | — | 220V 50Hz 1 Phase[2] |
| Year | — | 1995[2] |
| Condition | — | Used[2] |
| Inspection type | — | Non-patterned wafer particle inspection[3] |
| Light source | — | Algon laser[3] |
| Voltage | — | 208V[3] |
| Phase | — | 1 phase[3] |
| Frequency | — | 50/60Hz[3] |
| Vacuum | — | ~-23 inHg[3] |
| External exhaust | — | 4" diagram, 2 holes for system and laser[3] |
| System software | — | 4.2[3] |
| Operating system | — | Windows 98[3] |
| Install type | — | stand-alone[3] |