Comparison ledger
KLA .204 PSL Wafer, KLA 2367, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2367KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Only one wafer size at a time |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA 2367 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Shinko LP[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| SW Version | — | 10.4.507[4] |
| Wafer size | — | Only one wafer size at a time[4] |
| 300 mm (12") | — | Yaskawa + Asyst ISO Port or[4] |
| 200 mm (8") | — | Yaskawa + Asyst Versa Port (SMIF)[4] |
| GL | — | G Line[4] |
| IL | — | I Line[4] |
| VIS | — | Visible[4] |
| Equipment type | — | UV/visible brightfield inspector[5] |
| Inspection focus | — | sensitivity to a broad range of yield-relevant defect types[5] |
| Design node | — | 65nm and above[5] |
| Wafer sizes | — | 8 inch, 12 inch[4] |
| Wafer handling | — | only one wafer size at a time[4] |
| Software version | — | 10.4.507[4] |
| Lighting modes | — | GL: G Line; IL: I Line; VIS: Visible[4] |
| Inspection thresholds | — | 0.12 UV/GL/IL; 0.16 UV/GL/IL; 0.20 UV/GL/IL; 0.25 VIS; 0.39 VIS; 0.62 VIS[4] |
| Category | — | Metrology & Inspection[6] |
| Optical modes | — | GL: G Line; IL: I Line; VIS: Visible[4] |
| Resolution / sensitivity options | — | 0.12 UV/GL/IL; 0.16 UV/GL/IL; 0.20 UV/GL/IL; 0.25 VIS; 0.39 VIS; 0.62 VIS[4] |
| Inspection type | — | UV/visible brightfield inspector[5] |
| Node coverage | — | 65nm and above design nodes[5] |
| Throughput | — | Significantly improved throughput over its predecessor; 2x data rate increase over previous generation brightfield tools[5] |
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