Tool family
KLA 2367
KLA2 entries
Models in this family
The KLA 2367 is a metrology and inspection tool configured for 8-inch or 12-inch wafers, with only one wafer size at a time.
The KLA 2367 Brightfield is a brightfield inspection system with stated support for 200 mm cassettes and power requirements of 208 V, 16 A, 50/60 Hz, 3 phase.
All entries
- 2367KLA
The KLA 2367 is a metrology and inspection tool configured for 8-inch or 12-inch wafers, with only one wafer size at a time.
CategoryMetrology & InspectionWaferOnly one wafer size at a time14 specs - 2367 BrightfieldKLA
The KLA 2367 Brightfield is a brightfield inspection system with stated support for 200 mm cassettes and power requirements of 208 V, 16 A, 50/60 Hz, 3 phase.
CategoryMetrology & Inspection6 specs