Comparison ledger
KLA .204 PSL Wafer, KLA P 16 +, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P 16 +KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA P 16 + |
| Specifications | ||
| Configuration | NIST Traceable[1] | 2A, 20in Hg @ 1cfm[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Phase | — | 1 Phase[4] |
| Software | — | (OS) version 7.31.05 [Build 5][4] |
| Tool type | — | Stylus profilometer[5] |
| Measurement type | — | Step height, roughness, waviness, stress[5] |
| Vertical range | — | 327 µm[5] |
| Wafer sizes | — | 2, 3, 4, 5, 6, 8, 12 inch[5] |
| Stage | — | Fully motorized X-Y, Z, theta, and level stage[5] |
| Stylus | — | 2 µm / 60D[5] |
| Operating system | — | Windows XP[5] |
| Applications | — | CMP monitoring and bump metrology[5] |
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