Comparison ledger
Semitool 870, Semitool 880, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 870Semitool | 880Semitool |
|---|---|---|
| OEM | Semitool | Semitool |
| Category | Spin Rinser/Dryer | Spin Rinser/Dryer |
| Wafer size | 3" | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 870 | Semitool 880 |
| Cited variants | — | |
| Specifications | ||
| Tool type | Spin Rinser/Dryer[3] | — |
| Wafer boats | 3" and 4" wafer boats[3] | — |
| Rinse medium | DI water[3] | DI water to 15 MΩ[4] |
| Rinse purity | to 15 MΩ[3] | — |
| Drying method | heated nitrogen[3] | Heated nitrogen[4] |
| Category | Spin Rinser/Dryer[3] | — |
| Drying medium | heated nitrogen[3] | — |
| Wafer size | 3"[1] | — |
| Wafer capacity | up to 150mm / 6" wafers[2] | — |
| Process chambers | 2 process chambers[2] | — |
| Function | — | Spin Rinser/Dryer[4] |
| Boat compatibility | — | 4" and 5" mask boats, plus 6" wafer boat on request[4] |
Plan your fab
Building a Spin Rinser/Dryer process? Get a complete equipment list.
Open the fab equipment planner →