Waferpedia

Tool family

Semitool 870

Semitool3 entries
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Models in this family

  1. 870

    The Semitool 870 is a spin rinser/dryer that rinses substrates in DI water to 15 MΩ and dries them with heated nitrogen.

  2. 870 S Dual Stack Spin Rinse
  3. 870 S SRD

All entries

  1. 870Semitool

    The Semitool 870 is a spin rinser/dryer that rinses substrates in DI water to 15 MΩ and dries them with heated nitrogen.

    CategorySpin Rinser/DryerWafer3"
    5 specs
  2. 870 S Dual Stack Spin RinseSemitool
    CategoryWet Processing / Clean
    4 specs
  3. 870 S SRDSemitool
    5 specs