Semitool 870

Models in this family

1. 

   870

   The Semitool 870 is a spin rinser/dryer that rinses substrates in DI water to 15 MΩ and dries them with heated nitrogen.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   870 S	—	—	Dual Stack Spin Rinse Dryer used in semiconductor wet processing.	waferpedia.com[1]
   870-F	—	—	Affordable alternative to the S model, featuring a brush motor.	sitekprocess.com[2]
   ST-870	—	—	Classic version of the SRD with the traditional frame.	sitekprocess.com[2]

2. 

   870 S Dual Stack Spin Rinse

   The Semitool 870 S is a Dual Stack Spin Rinse Dryer (SRD) used in semiconductor wet processing.

3. 

   870 S SRD

   The Semitool 870 S is a spin rinse dryer (SRD) manufactured by Semitool for wet-processing and drying of semiconductor wafers.

Sources