Semitool
870
The Semitool 870 is a spin rinser/dryer. The Semitool 870 rinses substrates in DI water to 15 MΩ. The Semitool 870 dries substrates with heated nitrogen.[1][2]
How it works
Applications
The Semitool 870 is used for semiconductor wet processing and for rinsing and drying semiconductor wafers. The Semitool 870 is used on substrates loaded in 3 inch and 4 inch wafer boats.[1][3][2]
- Rinsing substrates
- Drying substrates
What do the numbers mean?
Wafer handling3
Configuration & options8
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 870 S | — | — | Dual Stack Spin Rinse Dryer used in semiconductor wet processing. | waferpedia.com[2] |
| 870-F | — | — | Affordable alternative to the S model, featuring a brush motor. | sitekprocess.com[3] |
| ST-870 | — | — | Classic version of the SRD with the traditional frame. | sitekprocess.com[3] |
What replaced it?
Related models
- siblingSemitool 270— Listed alongside the Semitool 870 in the wet chemistry equipment list.source[4]
- siblingSemitool 880— Listed alongside the 870 in the same wet chemistry equipment category.source[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 870 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 870 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 870 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 870 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 870 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 870 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]nanofab.ece.cmu.edu — nanofab.ece.cmu.edunanofab.ece.cmu.edu
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]sitekprocess.com — sitekprocess.comsitekprocess.com
- [4]Equipment - Claire & John Bertucci Nanotechnology Laboratory - College of Engineering - Carnegie Mellon University — nanofab.ece.cmu.edunanofab.ece.cmu.edu
Last updated Oct 18, 2026.
