Semitool

870

Research Quality: 40% complete

870 — nanofab.ece.cmu.edu — Fig. 01870nanofab.ece.cmu.edu^[1]

What is it?

The Semitool 870 is listed as a spin rinser/dryer and is described as using 3" and 4" wafer boats. It rinses substrates in DI water to 15 MΩ and dries them with heated nitrogen.

What can it run?

Process applications and technology nodes documented for this tool.

Rinsing substrates
Drying substrates

What do the numbers mean?

Wafer handling1

Wafer boats: 3" and 4" wafer boats^[1]

Configuration & options4

Tool type: Spin Rinser/Dryer^[1]
Rinse medium: DI water^[1]
Rinse purity: to 15 MΩ^[1]
Drying method: heated nitrogen^[1]

Interested in this tool?

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What replaced it?

siblingSemitool 270— Listed alongside the Semitool 870 in the wet chemistry equipment list.source^[2]
siblingSemitool 880— Listed alongside the 870 in the same wet chemistry equipment category.source^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of equipment is the Semitool 870?

It is a spin rinser/dryer.^[1]^[2]

How does the Semitool 870 rinse substrates?

It rinses substrates in deionized water to 15 MΩ.^[1]

How does the Semitool 870 dry substrates?

It dries substrates with heated nitrogen.^[1]

Not publicly documented

The following facts about the 870 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 870 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 870 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 870 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 870 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 870 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources

[1]nanofab.ece.cmu.edu — nanofab.ece.cmu.edunanofab.ece.cmu.edu
[2]Equipment - Claire & John Bertucci Nanotechnology Laboratory - College of Engineering - Carnegie Mellon University — nanofab.ece.cmu.edunanofab.ece.cmu.edu