Semitool

880

Spin Rinser/Dryer 4"Semitool 880 family

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880 — nanofab.ece.cmu.edu — Fig. 01880nanofab.ece.cmu.edu^[1]

What it is

The Semitool 880 is a spin rinser/dryer.^[1]^[2]

How it works

The tool rinses masks and wafers in deionized water to 15 MΩ and dries them with heated nitrogen.^[1]

Where it fits in the process flow

The tool accepts 4-inch and 5-inch mask boats, and a 6-inch wafer boat is available on request.^[1]

What can it run?

Process applications and technology nodes documented for this tool.

Rinsing masks
Rinsing wafers
Drying masks
Drying wafers

What do the numbers mean?

Wafer handling1

Boat compatibility: 4" and 5" mask boats, plus 6" wafer boat on request^[1]

Configuration & options3

Function: Spin Rinser/Dryer^[1]
Rinse medium: DI water to 15 MΩ^[1]
Drying method: Heated nitrogen^[1]

Interested in this tool?

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What replaced it?

siblingSemitool 270— Listed alongside the Semitool 270 as a Spin Rinser/Dryer in the wet chemistry equipment list.source^[2]
siblingSemitool 870— Listed alongside the 870 in the same wet chemistry equipment category.source^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What does the Semitool 880 do?

It rinses masks and wafers in deionized water to 15 MΩ and dries them with heated nitrogen.^[1]

What mask or wafer sizes does it handle?

It uses 4-inch and 5-inch mask boats, and a 6-inch wafer boat is available on request.^[1]

Not publicly documented

The following facts about the 880 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 880 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 880 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 880 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 880 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 880 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources

[1]nanofab.ece.cmu.edu — nanofab.ece.cmu.edunanofab.ece.cmu.edu
[2]Equipment - Claire & John Bertucci Nanotechnology Laboratory - College of Engineering - Carnegie Mellon University — nanofab.ece.cmu.edunanofab.ece.cmu.edu