Waferpedia

Tool family

Agilent E 500

AgilentIon Implantation3 entries
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Models in this family

  1. E 500

    The Agilent / Varian E 500 is an 8-inch medium current ion implanter.

  2. E 500 EHP
  3. E 500 EHPI

    The Agilent / Varian E 500 EHPI is a medium current ion implanter for 8-inch wafers from 2003.

All entries

  1. E 500Agilent

    The Agilent / Varian E 500 is an 8-inch medium current ion implanter.

    CategoryIon Implantation
    1 spec
  2. E 500 EHPAgilent
    CategoryIon Implantation
    1 spec
  3. E 500 EHPIAgilent

    The Agilent / Varian E 500 EHPI is a medium current ion implanter for 8-inch wafers from 2003.

    CategoryIon Implantation
    4 specs