Tool family
Aixtron G 5 WW C SiC Epitaxy Reactor
Models in this family
The Aixtron G 5 WW C SiC Epitaxy Reactor is a 6-inch wafer deposition system with a wafer transfer module.
Tool family
The Aixtron G 5 WW C SiC Epitaxy Reactor is a 6-inch wafer deposition system with a wafer transfer module.
