Waferpedia

Manufacturer

Aixtron

36 entries

  1. G 5 MOCVD ReactorAixtron
    CategoryDeposition
  2. BlackMagic 6Aixtron

    The Aixtron BlackMagic 6 is a plasma-enhanced chemical vapor deposition (PECVD) system designed for 6-inch wafers, used for carbon nanotube growth and graphene synthesis.

  3. AIX 2400 Planetary ReactorAixtron
    CategoryDeposition
  4. AIX 2800 G 4 WW MOCVD ReactorAixtron

    The Aixtron AIX 2800 G 4 WW is a metal organic chemical vapor deposition (MOCVD) reactor designed for processing 8-inch wafers.

    CategoryDeposition
  5. 2800 G 4 WWAixtron

    The Aixtron 2800 G 4 WW is a model from Aixtron.

  6. AIX G 5 WW EPIAixtron
    CategoryDeposition
  7. AIX G 10Aixtron
    CategoryDeposition
  8. 2400 G 2 MOCVD ReactorAixtron
    CategoryDeposition
  9. 2400 G 3 MOCVD ReactorAixtron
    CategoryDeposition
  10. 2600 G 3 HT MOCVD ReactorAixtron

    The Aixtron 2600 G 3 HT is a metal organic chemical vapor deposition reactor.

    CategoryDeposition
  11. 2600 G 3 HTAixtron
  12. G 3 ReactorAixtron
  13. G 3 MOCVDAixtron
    CategoryDeposition
  14. G 5 Plus MOCVDAixtron
    CategoryDeposition
  15. AIX R 6 MOCVDAixtron

    The Aixtron AIX R 6 is a metal organic chemical vapor deposition system.

    CategoryDeposition
  16. AIX 2400 G 3 R MOCVDAixtron

    The Aixtron AIX 2400 G 3 R is an MOCVD (Metal Organic Chemical Vapor Deposition) system.

    CategoryDeposition
  17. AIX G 4Aixtron

    The Aixtron AIX G 4 is a 4-inch deposition system for GaN epitaxy processes.

    CategoryDeposition
  18. AIX 2600 G 3Aixtron
  19. AIX 2600 G 3 RAixtron
  20. G 5 WW C SiC Epitaxy ReactorAixtron

    The Aixtron G 5 WW C SiC Epitaxy Reactor is a 6-inch wafer deposition system with a wafer transfer module.

    CategoryDepositionWaferWafer transfer module
  21. AIX 2600 G 3 Planetary ReactorAixtron
    CategoryDeposition
  22. AIX 2600 G 3 IC R Planetary ReactorAixtron

    The Aixtron AIX 2600 G 3 IC R Planetary Reactor is a deposition system described as a 3-phase, 4-wire + ground, 50/60 Hz unit.

    CategoryDeposition
  23. AIX G 5 + CAixtron
  24. G 5 HT MOCVDAixtron

    The Aixtron G 5 HT is an MOCVD (Metal Organic Chemical Vapor Deposition) system with stated wafer sizes of 4 inch and 6 inch.

    CategoryDeposition
  25. AIX 2800 G 4 HT MOCVDAixtron

    The Aixtron AIX 2800 G 4 HT is an MOCVD (Metal Organic Chemical Vapor Deposition) system.

    CategoryDeposition
  26. 2600 G 3 IC R MOCVD ReactorAixtron

    The Aixtron 2600 G 3 IC R is a MOCVD reactor configured for AlInGaP MOCVD epitaxy and 7 x 6-inch wafers.

    CategoryDeposition
  27. AIX 2600 G 3 MOCVDAixtron

    The Aixtron AIX 2600 G 3 is an MOCVD deposition system.

    CategoryDeposition
  28. AIX 2600 G 3 R MOCVD OMVPEAixtron

    The Aixtron AIX 2600 G 3 R is a MOCVD/OMVPE deposition system for GaAs or InP wafers, with wafer sizes stated as 2, 3, 4, and 6 inch.

    CategoryDeposition
  29. AIX 2600 G 3 MOCVD ReactorAixtron

    The Aixtron AIX 2600 G 3 is a MOCVD reactor for 2, 3, and 4 inch wafers.

    CategoryDeposition
  30. 2800 G 4 HT MOCVD ReactorAixtron
    CategoryDeposition
  31. G 5 PlusAixtron

    The Aixtron G 5 Plus is a GaN epitaxy deposition system stated to support 6-inch and 8-inch wafer sizes.

    CategoryDeposition
  32. AIX G 5 WW EPI ReactorAixtron

    The Aixtron AIX G 5 WW EPI Reactor is an epitaxial silicon deposition system for 4-inch wafers.

    CategoryDeposition
  33. G 5 HT IC 2 MOCVD ReactorAixtron

    The Aixtron G 5 HT IC 2 is a MOCVD reactor configured for InGaN MOCVD epitaxy and 6 x 6-inch wafers.

    CategoryDeposition
  34. 2600 G 3 HT IC MOCVD ReactorAixtron
    CategoryDeposition
  35. G 10 SiC EPI ReactorAixtron

    The Aixtron G 10 SiC EPI Reactor is an epitaxial silicon deposition system for 6-inch and 8-inch wafers.

    CategoryDeposition
  36. G 4 MOCVDAixtron

    The Aixtron G 4 MOCVD is a metal organic chemical vapor deposition system described with 4-inch wafer size support.

    CategoryDeposition