Waferpedia

Tool family

AJA CT1210

AJADeposition1 entry

The AJA CT1210 is a cylindrical target magnetron used for 3D sputtering where substrates are immersed into the target/cathode.

Models in this family

  1. The AJA CT1210 is a cylindrical target magnetron used for 3D sputtering where substrates are immersed into the target/cathode.