Waferpedia

Manufacturer

AJA

Email

Looking for practical guidance on AJA? The reference remains the primary source; requests are private, the network is growing, and a relevant match is not guaranteed.

16 entries

  1. ATC 2200AJA

    The AJA ATC 2200 is a UHV sputtering system used for physical vapor deposition of films on substrates.

    CategoryDepositionWafer6"
  2. ATC OrionAJA

    The AJA ATC Orion 8 UHV Sputtering System is a physical vapor deposition tool that deposits films on a substrate using magnetron sputtering.

    CategoryDepositionWafer6 in
  3. 9856 IRCAJA

    The AJA 9856 IRC is a sputtering system from AJA, categorized as deposition equipment.

    CategoryDeposition
  4. ATC 2036 EAJA

    The AJA ATC 2036 E is an evaporator with a 15-20 inch adjustable source-to-wafer length.

    CategoryDepositionWafer15-20” adjustable length from source to wafer
  5. A300-XPAJA

    The A300-XP is an AJA UHV magnetron sputtering source series described as an expanded-performance version of the A300 series.

    CategoryDeposition
  6. BSG-200AJA

    The AJA BSG-200 Series Substrate Holder is a backside-gas-cooled rotating substrate holder for wafers or similar planar substrates up to 200 mm in diameter.

    CategorySubstrate holderWafer200mm
  7. TR5313AJA

    The AJA TR5313 is a triangular magnetron sputtering source designed to optimize deposition uniformity onto a circle of substrates up to 8 inches in diameter.

    CategoryDepositionWaferup to 8-inch diameter substrates
  8. A300AJA

    AJA A300 is an A300 Series modular magnetron sputtering source used in Orion-series sputtering systems.

    CategoryDepositionWaferup to 6 in diameter
  9. ATC 1500 FAJA

    The AJA ATC 1500 F is a sputter coater with substrate size up to 3 inches.

    CategoryDeposition
  10. CT1210AJA

    The AJA CT1210 is a cylindrical target magnetron used for 3D sputtering where substrates are immersed into the target/cathode.

    CategoryDeposition
  11. NT-80AJA

    The AJA NT-80 is a Nautilus Series rotating magnetron with a configurable magnet array for optimizing target utilization, uniformity, or intentional non-uniformity.

    CategoryDeposition
  12. 300AJA

    The AJA 300 is a 300 amp water cooled thermal evaporation source used in AJA thermal evaporation systems.

    CategoryDeposition
  13. A3CVAJA

    The AJA A3CV is a magnetron sputtering source line with a common source head subassembly that accepts multiple target modules and is offered in HV and UHV mounting versions.

    CategoryDeposition
  14. SBE-6AJA

    The AJA SBE-6 is a Sputter Beam Epitaxy deposition system that combines sputtering with deposition quality described as rivaling molecular beam epitaxy.

    CategoryDeposition
  15. BSG-200SeriesAJA

    The AJA BSG-200 Series is a substrate holder for wafers or similar planar substrates up to 200 mm in diameter with direct backside gas cooling while rotating.

    CategorySubstrate holderWafer200mm
  16. Q2AJA

    The AJA Q2 is a loadlocked UHV sputter deposition system with RF and DC sputtering capability, RF substrate pre-treatment, and an in-chamber ion source for substrate cleaning.

    CategoryDeposition