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Tool family

Alcatel AMS 200 SE

AlcatelEtch1 entry

The Alcatel AMS 200 SE is a deep reactive ion etching system for silicon and silicon-on-insulator wafers.

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Models in this family

  1. AMS 200 SE

    The Alcatel AMS 200 SE is a deep reactive ion etching system for silicon and silicon-on-insulator wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    AMS200——Referenced as the AMS200 system and described as the same equipment in the source text.epfl.ch[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch