Waferpedia

Tool family

Applied Materials DPS

Applied Materials4 entries
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Models in this family

  1. DPS 2
  2. DPS G 5 Mesa

    Cited variants

    DesignationGenerationVintageChangesSource
    PULSE POLY—2010—Equipment inventory listing[1]
    EFEM ONLY—2013—Equipment inventory listing[2]
  3. DPS II
  4. DPS II CIP

All entries

  1. DPS 2Applied Materials
    CategoryEtch
    2 specs
  2. DPS G 5 MesaApplied Materials
    CategoryDeposition
    2 specs
  3. DPS IIApplied Materials
    CategoryEtch
    4 specs
  4. DPS II CIPApplied Materials
    CategoryEtch
    3 specs

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing