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Tool family

Applied Materials Vantage Vulcan RTP

Applied MaterialsThermal / Diffusion1 entry

Applied Materials Vantage Vulcan RTP System.

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Models in this family

  1. Vantage Vulcan RTP

    Applied Materials Vantage Vulcan RTP is a rapid thermal process system with 2 chambers.

    Cited variants

    DesignationGenerationVintageChangesSource
    Vantage Vulcan RTP System (Rapid Thermal Process) - 2 chambers - SA RTP (Co/Ni)——Specified as SA RTP (Co/Ni) and 2 chambers.Equipment inventory listing[1]
    Vantage Vulcan RTP System (Rapid Thermal Process) - 2 chambers - Normal RTA/RTO——Specified as Normal RTA/RTO and 2 chambers.Equipment inventory listing[2]
    Vantage Vulcan RTP System——Described in the sources with 2 chambers; one source specifies SA RTP (Co/Ni) and another specifies Normal RTA/RTO.Equipment inventory listing[1]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing