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ASM
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ASM A 412 LPCVD
Tool family
ASM A 412 LPCVD
ASM
·
Thermal / Diffusion
·
1 entry
ASM A 412 LPCVD Furnace.
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Models in this family
A 412 LPCVD
Cited variants
Designation
Generation
Vintage
Changes
Source
Poly
—
2006
Product text specifies this variant as "Poly".
Equipment inventory listing
[1]
NITR
—
2006
Product text specifies this variant as "NITR".
Equipment inventory listing
[1]
Sources
Sources (1)
Every fact above is drawn from these public sources
[1]
Equipment inventory listing