Waferpedia

Tool family

ASM A 412 LPCVD

ASM A 412 LPCVD Furnace.

Models in this family

  1. Cited variants

    DesignationGenerationVintageChangesSource
    Poly2006Product text specifies this variant as "Poly".Equipment inventory listing[1]
    NITR2006Product text specifies this variant as "NITR".Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing