Waferpedia

Tool family

ASML PAS 5000 55 A

ASMLLithography1 entry

ASML PAS 5000 55 A Stepper.

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Models in this family

  1. PAS 5000 55 A

    ASML PAS 5000 / 55 A is a stepper identified with an option set that includes Wafer Tilt Monitor.