ASML Twinscan AT 850

Models in this family

1. 

   Twinscan AT 850 B Wafer

   ASML Twinscan AT 850 B Wafer Stepper is a lithography tool described as a wafer stepper with several included modules and cabinets.

2. 

   Twinscan AT 850 D

   The ASML Twinscan AT 850 D is a semiconductor manufacturing tool offered with a Cymer ELS 7600 or ELS 6610 laser and a Tel Lithius track.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   ASML Twinscan AT 850 D - Laser: Cymer ELS 7600 - With Tel Lithius Track	—	—	States a Cymer ELS 7600 laser and Tel Lithius Track.	Equipment inventory listing[1]
   ASML Twinscan AT 850 D - 50/60 Hz - Laser: Cymer ELS 6610 - With Tel Lithius Track	—	—	States 50/60 Hz and a Cymer ELS 6610 laser with Tel Lithius Track.	Equipment inventory listing[2]

Sources