Tool family
ASML XT 1400 D ArF
ASML XT 1400 D ArF Scanner.
Models in this family
ASML XT 1400 D ArF Scanner is a lithography scanner described as supporting 8-inch and 12-inch wafers and including a wafer stage.
Tool family
ASML XT 1400 D ArF Scanner.
ASML XT 1400 D ArF Scanner is a lithography scanner described as supporting 8-inch and 12-inch wafers and including a wafer stage.
