Waferpedia

Tool family

Blue M 1200

Models in this family

  1. The Blue M 1200 C Box Furnace is a programmable high-temperature box furnace used for thermal processing of wafers and samples in a laboratory cleanroom environment.

    Cited variants

    DesignationGenerationVintageChangesSource
    HTF55322ASingle zone, 12 in. heated zone, 120 V version, tube diameter 1 to 3 in.thermofisher.com[1]
    HTF55322CSingle zone, 12 in. heated zone, 208/240 V version, tube diameter 1 to 3 in.thermofisher.com[1]
    HTF55342CSingle zone, 24 in. heated zone, 208/240 V version, tube diameter 1 to 3 in.thermofisher.com[1]
    HTF55347CThree zone, 24 in. heated zone, 208/240 V version, tube diameter 1 to 3 in.thermofisher.com[1]
    HTF55667CThree zone, 36 in. heated zone, 208/240 V version, tube diameter 3 to 6 in.thermofisher.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]thermofisher.comthermofisher.com