Blue M

1200

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Blue M1200

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Plate 01Tube furnace 1200 Blue M
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What is it?

The Blue M 1200 C Box Furnace is a programmable high-temperature box furnace used for thermal processing of wafers and samples in a laboratory cleanroom environment.

What do the numbers mean?

Control & software1

Controller: UP150 programmable controller^[1]

Configuration & options9

Equipment type: C box furnace^[1]
Type: Box furnace^[1]
Maximum temperature: 1200 °C^[1]
Minimum temperature setpoint: 0 °C^[1]
Maximum program segments: 16 segments (SP1–SP16, tM1–tM16)^[1]
Program end modes: Reset (shut off), Hold (hold temperature), Repeat (continuous)^[1]
Nitrogen flowmeter maximum: 13 slpm^[1]
PID coefficients: User-settable proportional (p), integral (I), derivative (d) via optimized table^[1]
Alarm temperature setting: Typically 10 °C higher than highest process temperature^[1]

Vintage & configurations

2010-05-27SOP revision date^[1]
SOP revision 1 dated 27 May 2010

Documented models & variants

Designation	Generation	Vintage	Changes	Source
HTF55322A	—	—	Single zone, 12 in. heated zone, 120 V version, tube diameter 1 to 3 in.	thermofisher.com^[2]
HTF55322C	—	—	Single zone, 12 in. heated zone, 208/240 V version, tube diameter 1 to 3 in.	thermofisher.com^[2]
HTF55342C	—	—	Single zone, 24 in. heated zone, 208/240 V version, tube diameter 1 to 3 in.	thermofisher.com^[2]
HTF55347C	—	—	Three zone, 24 in. heated zone, 208/240 V version, tube diameter 1 to 3 in.	thermofisher.com^[2]
HTF55667C	—	—	Three zone, 36 in. heated zone, 208/240 V version, tube diameter 3 to 6 in.	thermofisher.com^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the maximum operating temperature of the Blue M 1200?

The maximum operating temperature is 1200°C.^[1]^[2]

What heating elements are used in the tube furnace?

Moldatherm LGO (Light Gauge Overbend) heating element modules.^[2]

Not publicly documented

The following facts about the 1200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

The control-system platform and OS era of the 1200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1200 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 1200 are on record.
Answerable by: university cleanroom staff or an OEM application specialist

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Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
[2]thermofisher.com — thermofisher.comthermofisher.com
[3]Lindberg Blue M Split-Hinge High Temperature Tube Furnace — polytemp.nlpolytemp.nl