Waferpedia

Tool family

Buehler MetaServ 3000 Vector LC

BuehlerCMP1 entry

Buehler MetaServ 3000 Vector LC Grinder Polisher.

Models in this family

  1. The Buehler MetaServ 3000 Vector LC is a grinder/polisher with an 8-inch wafer size, 50 to 500 rpm, 120 V, and 3.5 A.