Tool family
Canon FPA 6000
Models in this family
The Canon FPA 6000 ES 5 is a KrF 248 nm scanner from 2003.
The Canon FPA 6000 ES 6 a is a 12-inch wafer lithography scanner using 248nm (KrF) exposure.
All entries
- FPA 6000 ES 5Canon
The Canon FPA 6000 ES 5 is a KrF 248 nm scanner from 2003.
CategoryLithography2 specs - FPA 6000 ES 6CanonCategoryLithography1 spec
- FPA 6000 ES 6 aCanon
The Canon FPA 6000 ES 6 a is a 12-inch wafer lithography scanner using 248nm (KrF) exposure.
CategoryLithography1 spec - FPA 6000 ES 6 a KrFCanonCategoryLithography5 specs