Waferpedia

Manufacturer

Canon

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90 entries

  1. FPA 2500 i 2Canon

    The Canon FPA 2500 i 2 is a stepper for semiconductor lithography, with documented vintages of 1993 and 1994.

    CategoryLithography
  2. FPA 5500 iZa MUVCanon
    CategoryLithography
  3. FPA 5510 iZ i-LineCanon

    The Canon FPA 5510 iZ is an i-line stepper for 12-inch wafer processing.

    CategoryLithography
  4. i 2 PartsCanon
  5. MPA 600 FA ProjectionCanon
    CategoryLithography
  6. PLA 500 FA MaskCanon
    CategoryLithography
  7. FPA 5500 iZa i-Line Wide FieldCanon
    CategoryLithography
  8. FPA 3030 i 5 + i-LineCanon
    CategoryLithography
  9. CME 70 VacuumCanon
    CategoryDeposition
  10. Bestem D 02Canon
    CategoryPackaging & Bonding
  11. Bestem D 01Canon
    CategoryPackaging & Bonding
  12. BCOS V In-LineCanon
    CategoryThermal / Diffusion
  13. Anelva I-1060 SV 2 + 1Canon
    CategoryDeposition
  14. Bestem D 10 SpCanon
    CategoryPackaging & Bonding
  15. Anelva E 800 SCanon
    CategoryDeposition
  16. Heatpulse 8800 RTACanon
    CategoryThermal / Diffusion
  17. FPA 3000 EX 6Canon
    CategoryLithography
  18. FPA 5500Canon
  19. MPA 600 FA PartsCanon
    WaferQuartz Wafer
  20. FPA 3000 iW PartsCanon
  21. PLA 501 FA Parallel Light MaskCanon
    CategoryLithography
  22. FPA 5510 iZCanon
    CategoryLithography
  23. MPA 600 FA Quartz WaferCanon
  24. MPA 600 FA POS Test MaskCanon
    CategoryTest & Probe
  25. BCOS JR UVCanon
    CategoryThermal / Diffusion
  26. MAS 801 HR Asher StripperCanon
  27. FPA 1550 M 4 WCanon
    CategoryLithography
  28. FPA 5500 iZaCanon
    CategoryLithography
  29. FPA 3000 i 4Canon
    CategoryLithography
  30. FPA 2500 i 3 Fine PatternCanon
    CategoryLithography
  31. Bestem D 531 tCanon
    CategoryPackaging & Bonding
  32. i 5Canon
    CategoryLithography
  33. Anelva FC 7100Canon
    CategoryDeposition
  34. 60 ES 6 ACanon
  35. GapCanon
  36. PLA 600 F Proximity Contact MaskCanon
    CategoryLithography
  37. 5500 iZACanon
    CategoryLithography
  38. Anelva ILD 4100Canon
  39. Anelva C 7100 PVD ClusterCanon

    Canon Anelva C 7100 PVD Cluster is a physical vapor deposition cluster tool with 8-inch wafer handling.

    CategoryDeposition
  40. FPA 3000 EX 5 Fine PatternCanon

    Canon FPA 3000 EX 5 is a fine pattern aligner.

    CategoryLithography
  41. PLA 501 FA Aligner ExposureCanon
    CategoryLithography
  42. Anelva C 7100 GTCanon
    CategoryDeposition
  43. MPA 500 Fab Focus MaskCanon
  44. MPA 500 Fab DR MaskCanon
  45. ASH 210Canon
  46. FPA 3000 iW Fine PatternCanon
    CategoryLithography
  47. 5510 ixCanon
    CategoryLithography
  48. FPA 3000 EX 6 KrFCanon
    CategoryLithography
  49. FPA 6000 ES 6 a KrFCanon
    CategoryLithography
  50. FPA 5500 iZ+Canon
    CategoryLithography
  51. FPA 3000 i 4 Fine PatternCanon
    CategoryLithography
  52. MPA 600 FA Mirror Projection MaskCanon
    CategoryLithography
  53. FPA 3000 i 5 + Fine PatternCanon

    Canon FPA 3000 i 5 + Fine Pattern is a lithography aligner described with a 6-inch wafer size.

    CategoryLithography
  54. FPA 3000 EX 5Canon
    CategoryLithography
  55. MPA 600 FA DR MaskCanon
  56. MPA 500 Fab PartsCanon
  57. MPA 600 FA Glass WaferCanon
  58. FPA 6000 ES 6 aCanon

    The Canon FPA 6000 ES 6 a is a 12-inch wafer lithography scanner using 248nm (KrF) exposure.

    CategoryLithography
  59. MPA 600 FA Focus MaskCanon
  60. FPA 3030 i 5+ Fine PatternCanon
    CategoryLithography