Waferpedia

Tool family

Cascade Microtech EPS150TRIAX

Cascade Microtech1 entry

The Cascade MicroTech EPS150TRIAX Probe Station is a probe station with a light shield enclosure for probing small features and measuring electrical properties.

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Models in this family

  1. EPS150TRIAX

    The Cascade MicroTech EPS150TRIAX Probe Station is a probe station with a light shield enclosure for probing small features and measuring electrical properties.