Waferpedia

Tool family

CEE 100CB

CEESpinner/Hotplate1 entry

The CEE 100CB is a spinner/hotplate for handling substrates from 1 cm² to 4-inch wafers and for use with standard positive photoresists only.

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Models in this family

  1. 100CB

    The CEE 100CB is a spinner/hotplate for handling substrates from 1 cm² to 4-inch wafers and for use with standard positive photoresists only.

    Cited variants

    DesignationGenerationVintageChangesSource
    CEE 100CB Table Top Spinner/Hotplate——Table-top configuration; mounted in an exhausted custom hood.nanofab.ece.cmu.edu[1]
    CEE 100CB Bench Mounted Spinner/Hotplate——Bench-mounted configuration; mounted in an exhausted wet bench.nanofab.ece.cmu.edu[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]nanofab.ece.cmu.edunanofab.ece.cmu.edu
  2. [2]nanofab.ece.cmu.edunanofab.ece.cmu.edu