Waferpedia

Tool family

CEE 200CBX

CEEspin coater1 entry

The CEE 200CBX is a precision coat-bake system described as a track-quality spin coater with a high-uniformity bake plate.

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Models in this family

  1. 200CBX

    The CEE 200CBX is a precision coat-bake system described as a track-quality spin coater with a high-uniformity bake plate.