CEE

200CBX

spin coater 200mm CEE 200CBX family

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200CBX — cnsi.ucsb.edu — Fig. 01200CBXcnsi.ucsb.edu^[2]

Plate 01CEE\Brewer Science 200CBX Spin Coater\Hot Plate #60654
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Wafer size

200mm

Performance

precision coat-bake system^[1]

Gas delivery

photoresist spinner^[1]

Control era

Windows

What is it?

Sources describe the Brewer Science CEE 200CBX as a precision coat-bake system used as a photoresist spinner / spin-bake unit. It is stated to include a track-quality precision spin coater, a high-uniformity bake plate, Windows-based GUI program control, and coating capability for substrates up to 200mm round or 7 in. square at speeds up to 6000 rpm.

What can it run?

Process applications and technology nodes documented for this tool.

photoresist spinning
spin-bake processing
coating substrates

What do the numbers mean?

Wafer handling1

Substrate size: up to 200mm round or 7 in. square^[1]

Gas & chemistry1

Usage description: photoresist spinner^[1]

Performance2

System type: precision coat-bake system^[1]
Description: track-quality precision spin coater with a high-uniformity bake plate^[1]

Control & software1

Control interface: Windows-based PC graphical user interface (GUI)^[1]

Configuration & options4

OEM: Brewer Science^[3]
Model: CEE 200CBX^[1]2 sources
Maximum spin speed: up to 6000 rpm^[1]
Dispense method: hand dispensed using pipettes^[1]

Vintage & configurations

Control-system eraWindows^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Usage descriptionphotoresist spinner^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 200CBX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 200CBX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 200CBX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
No publicly documented failure modes or field errata for the 200CBX are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 200CBX is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 200CBX are on record.
Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
[2]cnsi.ucsb.edu — cnsi.ucsb.educnsi.ucsb.edu
[3]udnf.udel.edu — udnf.udel.eduudnf.udel.edu

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Last updated Jul 29, 2026.

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