Waferpedia

Tool family

CHA 1000

CHADeposition2 entries
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Models in this family

  1. 1000

    The CHA 1000 is a 5-inch evaporator system with a 6-pocket E-gun, SR 10 power supply, and tri dome system.

  2. 1000 E-Beam

All entries

  1. 1000CHA

    The CHA 1000 is a 5-inch evaporator system with a 6-pocket E-gun, SR 10 power supply, and tri dome system.

    CategoryDeposition
    20 specs
  2. 1000 E-BeamCHA
    CategoryDeposition
    8 specs