Waferpedia

Tool family

CHA SEC-1000

CHADeposition1 entry

CHA SEC-1000 is a sputtering system described as a 10-inch system.

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Models in this family

  1. SEC-1000

    CHA SEC-1000 is a sputtering system described as a 10-inch system.

    Cited variants

    DesignationGenerationVintageChangesSource
    CHA SE-1000———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org