Waferpedia

Tool family

CHA SSC-1000

CHADeposition1 entry

The CHA SSC-1000 is a multi-station sputtering system configured with up to four RF or DC cathodes.

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Models in this family

  1. SSC-1000

    The CHA SSC-1000 is a multi-station sputtering system configured with up to four RF or DC cathodes.