Waferpedia

Tool family

Dektak 6M

DektakWet Processing / Clean1 entry

The Dektak 6M is a stylus profilometer used for film step-height measurement, surface topography profiling, and surface roughness measurement.

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Models in this family

  1. 6M

    The Dektak 6M is a stylus profilometer used for film step-height measurement, surface topography profiling, and surface roughness measurement.